JPS60201228A - 圧力センサ - Google Patents
圧力センサInfo
- Publication number
- JPS60201228A JPS60201228A JP5877084A JP5877084A JPS60201228A JP S60201228 A JPS60201228 A JP S60201228A JP 5877084 A JP5877084 A JP 5877084A JP 5877084 A JP5877084 A JP 5877084A JP S60201228 A JPS60201228 A JP S60201228A
- Authority
- JP
- Japan
- Prior art keywords
- pressure receiving
- pressure
- receiving diaphragm
- diaphragm
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 239000004065 semiconductor Substances 0.000 claims abstract description 16
- 239000013078 crystal Substances 0.000 claims abstract description 15
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 abstract description 7
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877084A JPS60201228A (ja) | 1984-03-27 | 1984-03-27 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877084A JPS60201228A (ja) | 1984-03-27 | 1984-03-27 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60201228A true JPS60201228A (ja) | 1985-10-11 |
| JPH0542609B2 JPH0542609B2 (en]) | 1993-06-29 |
Family
ID=13093779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5877084A Granted JPS60201228A (ja) | 1984-03-27 | 1984-03-27 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60201228A (en]) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56145327A (en) * | 1980-04-15 | 1981-11-12 | Fuji Electric Co Ltd | Pressure transducer |
| JPS5737235A (en) * | 1980-08-19 | 1982-03-01 | Omron Tateisi Electronics Co | Semiconductor pressure-sensitive device |
| JPS5782730A (en) * | 1980-11-10 | 1982-05-24 | Mitsubishi Electric Corp | Pressure sensor |
| JPS5826237A (ja) * | 1981-08-07 | 1983-02-16 | Mitsubishi Electric Corp | 圧力センサ |
-
1984
- 1984-03-27 JP JP5877084A patent/JPS60201228A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56145327A (en) * | 1980-04-15 | 1981-11-12 | Fuji Electric Co Ltd | Pressure transducer |
| JPS5737235A (en) * | 1980-08-19 | 1982-03-01 | Omron Tateisi Electronics Co | Semiconductor pressure-sensitive device |
| JPS5782730A (en) * | 1980-11-10 | 1982-05-24 | Mitsubishi Electric Corp | Pressure sensor |
| JPS5826237A (ja) * | 1981-08-07 | 1983-02-16 | Mitsubishi Electric Corp | 圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542609B2 (en]) | 1993-06-29 |
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